Axia ChemiSEM

Smart SEM-EDS for Fast Elemental Analysis

The Thermo Scientific Axia ChemiSEM combines high-resolution SEM with integrated EDS for real-time quantitative elemental analysis. This next-generation system simplifies workflows with automated features like SmartAlign, eliminating manual adjustments and ensuring instant, accurate results.

Its spacious chamber handles large samples up to 10 kg, ideal for industrial components, while rapid pump-down enables faster loading. The tungsten-source SEM-EDS delivers reliable performance for materials research, failure analysis, and contaminant identification.

Designed for efficiency, the Axia ChemiSEM reduces training time with an intuitive interface and requires minimal maintenance. Live quantitative mapping provides immediate elemental data, accelerating time-to-results in quality control and R&D.

Perfect for both new and experienced users, the Axia ChemiSEM makes advanced microscopy accessible while improving productivity across applications.

Experience faster SEM-EDS analysis with the Axia ChemiSEM.

Features

Live quantitative elemental mapping

Update your Analytical workflow with fully integrated, cutting-edge Thermo Scientific ChemiSEM technology that provides characterization in half the time.

Flexible sample loading

The flexible stage accommodates samples up to 10 kg with x-y movement, and the door opens fully for easy loading of large, awkward samples – while retaining a very fast pump down time.

Diverse application software

Handle advanced applications with advanced system automation option, such as Thermo Scientific Maps™ Software, and customize workflow development with Thermo Scientific AutoScript™ Software.

Easy to get started

Integrated User Guidance, live real-time compositional imaging, and alignment-free operation combine on this instrument to allow you to stay focused on data collection.

Excellent imaging performance

Easily handle a wide range of applications, including insulating samples with Low Vac operation and advanced beam scanning to ensure high-fidelity imaging.

Easy maintenance

Source exchange is easy and can be completed by any user, while the straightforward design translates to high uptime and rapid service when attention is needed.

Specifications

Standard	Motorized retractable backscatter detector TrueSight EDS detector Nav-Cam Camera—color optical camera for sample navigation Manual User Interface IR chamber camera Maps Software for tiling and stitching
Electron beam resolution	3.0 nm @ 30 kV (SE) 3.0 nm @ 30 kV (SE) (low vacuum) 8.0 nm @ 3 kV (SE) 7.0 nm @ 3 kV (BD mode* + BSE)
Chamber	Inner width: 280 mm Ports: an Axia ChemiSEM Scanning Electron Microscope configured with BSED and EDS offers 5 available ports
Stage	XY: 120×120 mm Tilt: -15 to +90 degrees Rotation: n x 360° With ZTR axes removed: Max. sample height: 128 mm Max. sample weight: 10 kg
Common options	Large TrueSight EDS detector Quasor-II EBSD ChemiSEM Advanced Technology for drift correction and quant maps per element ChemiView license for offline EDS data processing Beam Deceleration mode CleanHeater stage (up to 1,100°C) Photon cathodoluminescence detector AutoScript 4 Software—Python-based application programming interface Thermo Scientific TopoMaps Software for image colorization, image analysis, and 3D surface reconstruction

SCANNING ELECTRON MICROSCOPES (FLOOR MODEL)