| Tester Parameter |
RT66C |
| Voltage Range (built-in drive voltage) |
±200V |
| Voltage Range with an external amplifier and high voltage
interface (HVI) |
10KV |
| Number of ADC Bits |
14 |
| Minimum Charge Resolution |
122fC |
| Minimum Area Resolution (assuming 1 ADC bit = 1μC/cm2) |
12.2μ2 |
| Maximum Charge Resolution |
4.8μC |
| Maximum Area Resolution (assuming saturation polarization =
100μC/cm2) |
4.8mm2 |
| Maximum Charge Resolution with High Voltage Interface (HVI) |
480μC |
| Maximum Area Resolution (assuming saturation polarization =
100μC/cm2) w/o HVI |
>4.8cm2 |
| Maximum Hysteresis Frequency |
1KHz |
| Minimum Hysteresis Frequency |
1/8th Hz |
| Minimum Pulse Width |
500μs |
| Minimum Pulse Rise Time (5V) |
500μs |
| Maximum Pulse Width |
100ms |
| Maximum Delay between Pulses |
40ks |
| Internal Clock |
50μs |
| Minimum Leakage Current (assuming max current integration period
= 1 seconds) |
10pA |
| Maximum Small Signal Cap Frequency |
2KHz |
| Minimum Small Signal Cap Frequency |
10Hz |
| Output Rise Time Control |
2 settings |
| Input Capacitance |
1pF |
| Electrometer Input All Test Frequencies for all test at any
speed |
Yes |
| * The minimum area resolution under actual test
conditions
depends upon the
internal noise environment of the tester, the external noise
environment, and
the test jig parasitic capacitance. |
| *** Tester specifications are subject to change
without notice.
|
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